Category | Tool Type | Description(Maker etc.) |
Lithography | Stepper | Nikon, Canon, Ultratech, ASML |
Aligner | Canon(PLA/MPA), SUSS(MA series) | |
Coater/Developer | TEL(Mark-5/7/8, ACT-8/12), DNS (SKW/SCW/SDW Series) | |
Etch/Ash | Dry Etcher | AMAT(Centura), TEL(Unity), Lam |
Asher | Mattson, Alcatel , Canon, Novellus | |
Diffusion | Furnace/LPCVD | TEL(Alpha-8 etc.), Kokusai, Koyo, ASM |
RTP/RTA | (All) | |
CVD/PVD | CVD | AMAT(Centura/P-5000), Novellus(Concept One/Two), WJ |
Sputter/Evap | AMAT(Endura), ULVAC, Canon Anelva | |
CVD/PVD | CVD | AMAT(Centura/P-5000), Novellus(Concept One/Two), WJ |
Sputter/Evap | AMAT(Endura), ULVAC, Canon Anelva | |
Wet Process | Scrubber | DNS (SSW series) |
Clean/Dry | Semitool(SST/WSST) | |
Wet Etching | (All) | |
Ion Implantation | GSD, NOVA, Nissin | |
CMP | AMAT, Ebara | |
ASSY | (Backside)Grinder | Disco, TSK, Okamoto |
Dicer | Disco, TSK | |
Die Bonder | TOSOK, YAMAHA, Panasonic, JUKI | |
Wire Bonder | Shinkawa, KAIJO, K&S, ASM Pacific, Orthodyne, Ultrasonic Eng. | |
Mold/Package | Molding: TOWA, Apic Yamada etc. Singulation: ASM etc. Laser Marker: ASM etc. |
|
Test | Tester | ADVANTEST, TERADYNE, VERIGY (Agilent/HP), LTX/Credence, Shibasoku |
Prober | TEL(Alpha-8), TSK(UF200) etc. | |
Handler | Epson, YOKOGAWA | |
SMT | Reflow Oven, Solder Printer etc. | |
Others | --- | SEM (Hitachi S-xxxx etc.) Metrology/Inspection tools (KLA-Tencor SFS 6xxx/7xxx, P-10/15 etc.) Laser Repair(ESI) He Leak DetektorNew |
Category/Type | Description(Maker etc.) |
LCD Related | (All) |
Electrical Components | (Solar cell Manuf. related) |
Machine Tools | SUS tube welder etc. |